Atomic Layer Deposition for Semiconductors

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.Publisher: Springer; 2014 edition (October 19, 2013) ISBN-10: 9781461480532 ISBN-13: 978-1461480532